Parallel plate type vacuum plasma treatment device
Various functional groups (hydrophilic, lipophilic, adhesion improvement, etc.) can be chemically bonded to various substrates and films according to their applications.
The "PC-RIE series" is capable of providing various surface modification effects on different substrates and films. Of course, it can also perform treatments such as ashing, etching, and descumming as a general plasma treatment device. You can choose a version that suits your needs, ranging from a manually operated research and development type chamber to a fully automated system with an atmospheric gate, transport mechanism, and cassette station. 【Features】 ○ Functional group modification treatment ○ Reactive Ion Etching (RIE) For more details, please download the PDF or contact us.
- Company：電子技研
- Price：Other
